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POST LAPPING CLEANER( PLC)


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Final Cleaner
Product Specifications:
1. Scope of application: 8-inch/12-inch silicon wafer
2. Process flow: tank-type batch cleaning, customized by customers;
3. Capacity: 100,000 ~150,000 pcs/month, according to the technological process;
4. Handling method: cassette; cassette less;
5. Main function tank: SC-1 with swing and megasound; HF/HCL; O3; QDR; LIFT Dry, etc.;
6. Loading and unloading: Foup in Foup out, which can correspond to OHT;
7. Equipment communication: SECS/GEM;
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Service Hotline
Tel:0573-80709601
Fax:0573-80701270
Address: No. 129, Shuanglian Road, Haining Economic Development Zone, Haining City, Jiaxing City, Zhejiang Province
Copyright © Zhejiang Echo Semiconductor Equipment Co., Ltd. 浙ICP备2021028978号-1
Copyright ©Zhejiang Echo Semiconductor Equipment Co., Ltd.
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