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Company address:
No. 129 Shuanglian Road, Haining Economic Development Zone, Haining City, Jiaxing City, Zhejiang Province
Double Side Polishing Cleaner（DSPC）
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Product Introduction
Product Introduction
Product Specifications:
1. Scope of application: 12 inch silicon wafer
2. Process flow: tank-type batch cleaning, customized by customers;
3. Capacity: According to the technological process;
4. Handling method: cassette less;
5. Main function tank: SC-1; HF/HCL; O3; QDR; LIFT Dry, etc.;
6. Loading and unloading: Wet Cart in Foup out, which can correspond to OHT;
7. Equipment communication: SECS/GEM;
Service Hotline
Phone:0573-80709601
Fax: 0573-80701270
Address: No. 129 Shuanglian Road, Haining Economic Development Zone, Haining City, Jiaxing City, Zhejiang Province
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