De-Wax Cleaner
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  • De-Wax Cleaner

De-Wax Cleaner


Product Introduction

It is used for the cleaning of silicon wafers to remove wax, and to remove the wax layer on the polishing back of silicon wafers to meet the process requirements.

Product Introduction

Product Specifications:

1. Scope of application: 8-inch silicon wafer
2. Process flow: tank-type batch cleaning, customized by customers;
3. Capacity: According to the technological process;
4. Handling method: PFA cassette;
5. Equipment communication: SECS/GEM;


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