scroll down

Our brand philosophy

Attention to detail. Keep improving

Pay attention to details and

Strive for perfection

Zhejiang Echo Semiconductor Equipment Co., Ltd. is specialized in providing high-precision, high-performance cleaning and etching equipment for semiconductor chip and large-size silicon wafer manufacturers.

 

We uphold Japan's mature cleaning and corrosion equipment design and manufacturing technology, and provide users with customized equipment, from design, production, installation and commissioning, to pre-sales, in-sales, and after-sales correspondence and maintenance.

 

It has established good business relationships with many domestic silicon wafer production plants.

Read More

News Center

09-10

2021

On Ultrasonic Cleaning Technology for Silicon Wafers

In the preparation process of semiconductor materials, every single step involves cleaning, and the quality of cleaning directly affects the subsequent processing steps—and even impacts the yield and reliability of finished devices. Due to the rapid increase in ULSI integration density and the shrinking dimensions of devices, the requirements for wafer surface cleanliness have become increasingly stringent. ULSI processes demand that the substrate wafers provided should have no more than 500 particles/m² × 0.12 μm in size, and metal contamination must be less than 10¹⁰ atoms/cm². Any potential contamination present at each stage of wafer production can lead to defect formation and device failure. Therefore, wafer cleaning has attracted considerable attention from industry professionals. Previously, many manufacturers relied on manual washing methods, which involved significant human intervention. On the one hand, this approach was prone to generating debris, thereby reducing economic efficiency; on the other hand, manually cleaned wafers often exhibited poor surface cleanliness and severe contamination, resulting in a lower pass rate during subsequent chemical polishing and etching processes. Consequently, wafer cleaning technology has come under intense scrutiny, and finding a simple and effective cleaning method has become an urgent priority. A specialized technique—ultrasonic cleaning—has been introduced, demonstrating remarkable effectiveness in cleaning silicon wafers and representing a promising cleaning technology worthy of wider adoption.

中企跨境-全域组件 1.92 制作前进入CSS配置样式

Tel:

微信:

在线客服添加返回顶部

启用全局默认滚动动画 (向上滚动)

右侧在线客服样式 1,2,3 1

图片alt标题设置: Zhejiang Echo Semiconductor Equipment Co., Ltd.

表单验证提示文本: The content cannot be empty!

循环体没有内容时: Sorry, no matching items were found.

CSS / JS 文件放置地